过滤器的改进
Filter Update
27、聚α烯(PAO)气溶胶对聚四氟乙烯介质高效过滤器(试验)压差的作用效果
The Effect of PAO Aerosol Challenge
on the Differential Pressure of
a Gore-Tex Media HEPA (Experimental)
Filter
罗纳德.罗伯特,代夫.阿那德 Ronald Roberts
and Dave Arnold
28、带高效过滤器的小型空气洁净器现场维修的消毒方法
The Sterilizing Method for the
Small Air Cleaner with HEPA Filter,
When the Maintenance Is at the
Site
安迪.瓦特那勃,塔卡由基.塔那卡 Andy Watanabe
and Takayuki Tanaka
29、使用晶片暴露方式及试验性风机过滤器单元评估化学过滤器
Evaluation of Chemical Filter
Using Wafer Exposure Method and
Experimental FFU
野中立夫、武田久男、饭川理行、多伊良俊一、藤本竹利
Tatsuo Nonaka, Kikuo Takeda,Reiko
Likawa, Toshikazu Taira, and Taketoshi Fujimoto
30、清除有机污染的陶瓷化学过滤器
Ceramic Chemical Filter for
Removal of Organic Contaminants
坂田壮一郎、高桥秀远、佐藤克三、古村秀远
Soichiro Sakata, Hideto Takahashi,
Katsumi Sato, and Atsushi Takahashi
大学文章
University Presentation
31、半导体制造设施建设中的资源要求
Resource Requirements for Construction
of a Semiconductor
Manufacturing Facility
安诺哈夫o巴格瓦,贝尔克兹.鄂兹特米尔,阿兰.恰西
Anubhav Bhargava, Balkiz Oztemir,
and Allan D. Chasey
32、先进技术环境的规范、标准及符合规范的替代模式
Codes and Standards and Alternate
Code Compliance Model for Advanced
Technology Environments
杰尼弗.琼斯,阿兰.洽西
Jennifer A. Jones and Allan
D. Chasey
33、半导体设施程式化,减少设施建设费
Benchmarking Semiconductor Facilities
to Reduce Facility
Construction Costs
杰夫o琼斯,沙罗克,阿兰洽西
Jeff Jones, Shawn O'Rourke,
and Allan D. Chasey
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