7、 对排放气流时间变化的评估
Estimate of Time Change of the
Gas Emission Flux
田村启、藤井秀二、钩直木 Hajime Tamura,
Shuji Fujii, and Naoki Kagi
8、 开发超声提取法评估静电强化颗粒沉淀式晶片存储箱的洁净度
Development of an Ultrasonic
Extraction Method of Evaluate the
Cleanliness of Wafer Storage
Boxes Prepared by Electrostatically
Enhanced Particle Deposition
王华平,柯克.米克森,刘本加明
Huaping Wang, Kirk Mikkelsen, and
Benjamin Y. H. Liu
9、 高浓度颗粒环境下的取样
Sampling High Concentration
Ambient Particles
纳康.特培王,纳特.瓦瑞斯,苏加.苏克迈,阿拉克.李
Nakorn Tippayawong,
Nat Vorayos, Sujja Suksamai,
and Aleck Lee
悬浮分子污染 Ⅰ
Airborne Molecular Contamination I
10、使用温度压力箱对卫星部件进行气体释放试验
Outgassing Experiment on a Satellite
Component Using Bake-Out Chamber
朴贵文、蔡索文、何均索、李醒宏、李东金、李星汉 Guee-Won
Moon, Seok-
Weon Choi,Hee-Jun Seo, Sang-Hoon
Lee, Dong-Jin Lee, and Sang-Seol Lee
11、洁净室空气中酸性和碱性化合物在硅晶片表面的沾附特性
Sticking Behavior of Acidic
and Basic Compounds in Clean Room Air
onto Silicon Wafer Surface
桃来加奈、武田菊男、饭川伶子、尾川纪子、今井谆、藤本武利
Kana Momoji, Kikuo Takeda,Reiko
Likawa, Noriko Ohkawa, Makoto Imai,
and Taketoshi Fujimoto
12、建筑材料以其内部特性散发挥发性有机化合物的机理
VOC Emission Mechanisms from
Building Materials by Considering
International Behavior
钩直木、藤井秀二、田村启 Naoki Kagi, Shuji
Fujii, and Hajime Tamura
13、以分子模拟化学污染物的吸收特性
Adsorption Behavior of Chemical
Contaminants by Molecular Simulation
悟堂正纯、武志全司、友成睦地、三浦国尾、高见知志、久保百治、宫本明荣
Masazumi Godo,Takeshi Takatsuka,
Mutsuya Tomonari, Kunio Miura,
Seiichi Takami, Momoji Kubo,
andAkira Miyamoto
14、使用温控石英微量计(TQCM)对洁净室的分子污染进行长期测量
Long-Term Measurement of Molecular
Contamination in a Cleanroom Using
a Temperature-Controlled Quartz
Crystal Microbalance (TQCM)
威廉姆.米切尔
William J. Moitchell
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